| Issue |
ESAIM: COCV
Volume 22, Number 2, April-June 2016
|
|
|---|---|---|
| Page(s) | 417 - 438 | |
| DOI | https://doi.org/10.1051/cocv/2015012 | |
| Published online | 08 March 2016 | |
A variational approach to a stationary free boundary problem modeling MEMS∗
1
Institut de Mathématiques de Toulouse, UMR 5219, Université de
Toulouse, CNRS, 31062
Toulouse cedex 9,
France.
laurenco@math.univ-toulouse.fr
2
Leibniz Universität Hannover, Institut für Angewandte Mathematik,
Welfengarten 1, 30167
Hannover, Germany.
walker@ifam.uni-hannover.de
Received:
31
August
2014
Revised:
20
January
2015
A variational approach is employed to find stationary solutions to a free boundary problem modeling an idealized electrostatically actuated MEMS device made of an elastic plate coated with a thin dielectric film and suspended above a rigid ground plate. The model couples a non-local fourth-order equation for the elastic plate deflection to the harmonic electrostatic potential in the free domain between the elastic and the ground plate. The corresponding energy is non-coercive reflecting an inherent singularity related to a possible touchdown of the elastic plate. Stationary solutions are constructed using a constrained minimization problem. A by-product is the existence of at least two stationary solutions for some values of the applied voltage.
Mathematics Subject Classification: 35J35 / 35R35 / 35Q74
Key words: MEMS / free boundary / stationary solutions / multiplicity / constrained minimization
© EDP Sciences, SMAI 2016
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